|
 |
|
Comparison |
|
| Applications |
LSI Dry
Etching
（BCL3）
 |
Ceramic Vacuum
Baking Furnace
(Ceramic Powder)
 |
LSI Iron Implanter
(Phosphorous
Arsenic Compounds)
 |
| Element Life |
1
Year |
1
Year |
1
Year - 1.5 years |
Vacuum Pump
Life Extension |
3
Months → 5 Years |
6
Months → 5 Years |
4
Months → 4 Years |
| (or more) |
(or more) |
(or more) |
| Cost Reduction |
1/10 |
1/5 - 1/10 |
1/10 |
|
|
|
