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TOP >> Product Information [Outline] >> Powder Removal from Gas [Features]
@TRAPPACK Features
  Element Type Coil Type Combination Type
Appearance
&
Construction
TRAPPACK
Element
› \ ›
Coil Element \ › ›
Installation Areas Fore line, Exhaust Fore line, Exhaust Exhaust
Pressure Loss Very Little à0 Very Little
 Uses  Applied
Processes
Implanting, Etching
CVD, Etching
CVD, Etching
Gases BF3, AsH3, PH3
BCL3, CL2
SiH4, NH3, NF3
BCL3, CL2
SiH4, NH3, NF3
BCL3, CL2
@TRAPPACK Element
The TRAPPACK Element is comprised of specially designed high function ion-exchange fibers, capable of adsorbing reactive generates (powder) to the fibers on the surface of the Element. We provide two different shapes of Elements, the cylindrically molded “TRAPPACK Element“ and the sheet type “Coil Element“.
TRAPPACK Element Coil Element
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TRAPPACK Element
The TRAPPACK Element is versatile and comes in a wide variety of shapes and densities. The Coil Element has several different models designed for NEW TRAPPACK Models
Element Type Model / Element Type Specifications Element Standard
Model Element Type

TRAPPACK Element TU-200 EL

High Density


Medium Density


Low Density


Standard Spec.
(Exhaust Side)

 


Vacuum Spec.
(Vacuum Side)
TU-250 FL
TU-500 GL
TU-1000
TU-500W HL
TU-1500
TU-2100
TU-3100 IL
TU-4100 KL
Coil Element TU-25LM ASD-25LM 3 - Coil

4 - Coil

5 - Coil

6 - Coil
TU-50LM ASD-50LM
TU-65LM ASD-65LM
TU-85LM ASD-85LM
TU-1500 ASD-1500
TU-2100 ASD-2100
TU-3100 ASD-3100
TU-4100 ASD-4100
@Adsorption Mechanism and Performance
ƒ}ƒOƒlƒbƒgƒtƒ@ƒCƒo[   Function of Magnet Fiber
  At the surface of the positive and negative ion-exchange fibers reactive generates (powders) are adsorbed. This causes the powder to build up on the magnet fibers, making them larger.

ƒgƒ‰ƒpƒbƒNƒGƒŒƒƒ“ƒg   Used TRAPPACK Element
  TRAPPACK Elements trap reactive generates (powder) at all points of the Element, causing it to become completely saturated with this powder. After an Element has been completely worn, the accumulated powder weighs more than 10 times the Elements original weight.

‚¤‚¸ƒGƒŒƒƒ“ƒg   Used Coil Element
  The Coil Element is installed in the coil construction (Coil Working Plate). The reactive generates (powder) in the exhaust gas, flow from the outside to the center where the powder repeatedly collides with the swirling coil. When the powder collides with the coil it is adsorbed and trapped.
@Features
TRAPPACK Element
 
‚«”\ Removes fine reactive generates (powder)
’ᑹˆ³ Low density and large mesh clearance.
‘å—ʕߏW Powder is trapped on the surface and the inside of the Element.
Coil Element
 
‚«”\ Due to the coils construction, powder cannot obstruct the gas
’ᑹˆ³ The combination of multiple coils and pitches almost shuts out all powder
‘å—ʕߏW Adsorbed powder molecules magnetically absorb other powder molecules