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TRAPPACK Features |
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Element Type |
Coil Type |
Combination Type |
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Appearance
&
Construction |
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TRAPPACK
Element |
○ |
― |
○ |
| Coil Element |
― |
○ |
○ |
| Installation Areas |
Fore line, Exhaust |
Fore line, Exhaust |
Exhaust |
| Pressure Loss |
Very Little |
≒0 |
Very Little |
Uses |
Applied
Processes |
Implanting, Etching
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CVD, Etching
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CVD, Etching |
| Gases |
BF3, AsH3, PH3
BCL3, CL2 |
SiH4, NH3, NF3
BCL3, CL2 |
SiH4, NH3, NF3
BCL3, CL2 |
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| TRAPPACK Element |
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| The TRAPPACK Element is comprised of specially designed high function
ion-exchange fibers, capable of adsorbing reactive generates (powder) to the fibers on the surface of the Element. We provide two different shapes of Elements, the cylindrically molded “TRAPPACK Element“ and the sheet type “Coil Element“. |
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| TRAPPACK Element |
Coil Element |
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TRAPPACK Element |
| The TRAPPACK Element is versatile
and comes in a wide variety of shapes and densities. The Coil Element has
several different models designed for NEW TRAPPACK Models |
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| Element Type |
Model / Element Type |
Specifications |
Element Standard |
| Model |
Element Type |
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| TRAPPACK Element |
TU-200 |
EL |
High Density
Medium Density
Low Density
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Standard Spec.
(Exhaust Side)
Vacuum Spec.
(Vacuum Side)
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| TU-250 |
FL |
| TU-500 |
GL |
| TU-1000 |
| TU-500W |
HL |
| TU-1500 |
| TU-2100 |
| TU-3100 |
IL |
| TU-4100 |
KL |
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| Coil Element |
TU-25LM |
ASD-25LM |
3 - Coil
4 - Coil
5 - Coil
6 - Coil |
| TU-50LM |
ASD-50LM |
| TU-65LM |
ASD-65LM |
| TU-85LM |
ASD-85LM |
| TU-1500 |
ASD-1500 |
| TU-2100 |
ASD-2100 |
| TU-3100 |
ASD-3100 |
| TU-4100 |
ASD-4100 |
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| Adsorption Mechanism and Performance |
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Function of Magnet Fiber |
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At the surface of the
positive and negative ion-exchange fibers reactive generates (powders) are
adsorbed. This causes the powder to build up on the magnet fibers, making them
larger.
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Used TRAPPACK Element |
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TRAPPACK Elements trap reactive generates (powder) at all points of the Element, causing it to become completely saturated with this powder. After an Element has been completely worn, the accumulated powder weighs more than 10 times the Elements original weight.
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Used Coil Element |
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The Coil Element is
installed in the coil construction (Coil Working Plate). The reactive generates (powder) in the exhaust gas, flow from the outside to the center where the powder repeatedly collides with the swirling coil. When the powder collides with the coil it is adsorbed and trapped. |
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Features |
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TRAPPACK Element |
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Removes fine reactive generates (powder) |
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Low density and large mesh clearance. |
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Powder is trapped on the surface and the inside of the
Element. |
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Coil Element |
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Due to the coils construction, powder cannot obstruct the gas |
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The combination of multiple coils and pitches almost shuts
out all powder |
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Adsorbed powder molecules magnetically absorb other powder
molecules |
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