TAISEI GIKEN’s Heating Gas Unit “HOT-N2” controls reactive generates not to be
solidified as powder by the Unit heating up N2 and mixing such hot N2 with gas.
The Unit is also used to shorten regenerating time of Cryo pump and drying time
of vacuum drying equipment, which guarantees decreasing man-hours drastically
and also increasing productivity.
What is HO-N2 UNIT?
The Unit which quickly heating up N2(Nitrogen) inside of vacuum equipment,
vacuum pump and exhaust gas pipes.
What is Spiral Stream Generator？
The Generator with the spiral shape of its inner wall keeps hot N2 for long time.
System configuration
Applications
・Preventing clogging of reactive generates(by-products) in exhaust pipe system for
Etching, CVD, ALD, Ion-Implant and etc.
・Preventing deposition of reactive generates in exhaust pipe system after the powder
trap “TRAPPACK”.
・Preventing deposition and adhesion of reactive generates at around rotor portion of
dry pump.
・Preventing deposition and adhesion of reactive generates inside of the pipe at around
TMP exit.
Features
・Cartridge type heater gives longer life of the Unit.
・Superior airtightness(less than 1X10・m2/sec)
・Compact design, thus small space for installation
System Configuration (Shortening regenerating time of Cryo Pump)
Application
・Shortening regenerating time of Cryo Pump
Features
・The Heater exclusive for Cryo Pump. Small and light weight.
・Compact design・Easy installation
・Customize specifications according to the request from customer.
・Safety・Heat protection
